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Product categories 9N series purifier 8N/7N series purifier 6N series purifier 9NP/8NP terminal purifier POU nitrogen purifier supporting gas purifier high-efficiency catalytic adsorption material Ultra-pure gas on-site supply and operation management exhaust tail gas recovery purification and recycling device Industrial by-product hydrogen production High-purity hydrogen plant PSA to produce high-purity hydrogen

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9N series purifier（0.1ppb）

Application field:

Application areas: electronic semiconductors, large-scale integrated circuits, MAMS, monocrystalline silicon polycrystalline silicon and silicon epitaxy, LED, TFT, gallium nitride, silicon carbide, scientific research and development, experimental analysis, etc.

Characteristics:

● Two towers alternate adsorption regeneration, automatic continuous operation
● EP class 316L polished stainless steel pipe fittings
● Removal rate up to 99.9999999% with 0.003 m filter
● Siemens PLC can be connected to DCS system
● The security alarm function is perfect
● Remote cloud service is available
● Production and assembly in a super clean environment
● Gas capacity 10-20000nm³ /h

9N ultrapure gas purifier

Series models

For gas

Raw gas index

Product gas index

N₂

H₂

O₂

H₂O

CO₂

CH₄

H₂

N₂

颗粒度

9VV

●

≤0.1ppb

—

≤0.1ppb

—

0.003μm

9OVV

●

—

●

≤0.1ppb

—

0.003μm

9VVX

—

●

≤0.1ppb

0.003μm

—

●

—

≤0.1ppb

—

≤0.1ppb

0.003μm

—

●

≤0.1ppb

0.003μm

—

●

—

≤0.1ppb

—

≤0.1ppb

0.003μm

Note: Common flow specifications：1-20000Nm³/h;Commonly used pressure：1-20Mpa

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